Title :
Vertically aligned carbon nanotubes field emission devices fabricated by furnace thermal CVD at atmospheric pressure
Author :
Wei, S. ; Kang, W.P. ; Davidson, J.L. ; Hofmeister, W.H. ; Choi, B.K. ; Huang, J.H.
Author_Institution :
Interdisciplinary Program in Mater. Sci., Vanderbilt Univ., USA
Abstract :
In this paper, vertically aligned carbon nanotubes field emission devices were fabricated from the as grown carbon nanotubes (CNTs) by furnace thermal CVD at atmospheric pressure. The device was tested in vacuum (∼10-6 torr) for field emission characterization. The turn-on field was about 3 V/μm, which is comparable to data reported elsewhere.
Keywords :
carbon nanotubes; chemical vapour deposition; field emission; nanotube devices; vacuum microelectronics; C; atmospheric pressure; field emission; furnace thermal CVD; turn-on field; vertically aligned carbon nanotubes field emission devices; Carbon nanotubes; Cathodes; Chemical vapor deposition; Diodes; Furnaces; Morphology; Raman scattering; Scanning electron microscopy; Spectroscopy; Temperature;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2005.1619595
