Title :
Carbon nanotube field emission arrays in an integrated gate structure
Author :
Ding, Ming Q. ; Li, Xinghui ; Bai, Guodong ; Zhang, Fuquan ; Li, Hanyan ; Feng, Jing J.
Author_Institution :
Nat. Lab. for High-Power Vacuum Electron., Beijing Vacuum Electron. Res. Inst., China
Abstract :
Two types of micro-gated carbon nanotube (CNT) field emission arrays(CNT FEAs) with a few vertically aligned CNT emitters in each cell have been fabricated. Field emission measurements are given.
Keywords :
carbon nanotubes; field emitter arrays; integrated circuits; nanoelectronics; nanotube devices; C; carbon nanotube emitters; field emission arrays; integrated gate structure; microgated nanotube; vertically aligned emitters; Anodes; Apertures; Buffer layers; Carbon nanotubes; Etching; Fabrication; Field emitter arrays; Laboratories; Process control; Voltage;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2005. IVNC 2005. Technical Digest of the 18th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2005.1619603
