Title :
From 2D to 3D FEM simulations of a CMOS MEMS convective accelerometer
Author :
Mezghani, B. ; Brahim, A. ; Tounsi, F. ; Masmoudi, M. ; Rekik, A.A. ; Nouet, P.
Author_Institution :
Nat. Eng. Sch. of Sfax, Univ. of Sfax, Sfax, Tunisia
Abstract :
In this paper, we present 3D FEM simulations of a CMOS MEMS convective accelerometer. Differences between 3D and previously published 2D simulations are also discussed. We describe sensor architecture and we present a sensor model that is used for 3D FEM simulations. The prototype has a heater-cavity border distance of 350μm. We show the details of the sensitivity evaluation along the sensitive axis. It is found that the maximum sensitivity location is at a distance of 125μm from the heater center. So, the detector should be placed closer to the heater than the mid distance. It is shown that this is closely related to the smaller size of isotherms obtained in 3D simulations.
Keywords :
CMOS integrated circuits; accelerometers; finite element analysis; microsensors; sensitivity; 2D FEM simulations; 3D FEM simulations; CMOS MEMS convective accelerometer; distance 125 mum; distance 350 mum; heater-cavity border distance; isotherms; maximum sensitivity location; sensitivity evaluation; sensor architecture; sensor model; Accelerometers; Detectors; Heating; Sensitivity; Solid modeling; Temperature sensors; Three dimensional displays; CMOS; Convective accelerometer; FEM simulation; MEMS;
Conference_Titel :
Microelectronics (ICM), 2011 International Conference on
Conference_Location :
Hammamet
Print_ISBN :
978-1-4577-2207-3
DOI :
10.1109/ICM.2011.6177384
