The analysis of X-Ray diffraction by Al3+ implanted Polytetrafluorethylene

Elastic-metal pads (EMP) were implanted by low energy aluminum ion in a metal vapor vacuum arc (MEVVA) implanter. The samples were irradiated by 20 keV Al ions with various dosages from 1 × 10¹⁵ to 1 × 10¹⁶ Al/cm². Through the detailed analysis of X-ray diffraction by before and after implanted samples, some changes in microstructures between before and after implanted samples have been found, which will be the basic data of the further research. The results of XRD analysis show that: with augmenting the dose of Al³⁺, elastic modulus(E) of samples increase, the sizes of crystallites decrease, and the crystallinity get some small drop; after implantation, crystal lattice distortions were caused and inner-distortions of crystal grating play the main role even the distortions among crystallites increase with the increasing of the dose, also, some mechanisms of the properties improvement of Polytetrafluorethylene by Aluminum ions implantation were discussed according to these results.