Title :
A microsystem for trace environmental monitoring
Author :
Martin, Steven M. ; Gebara, Fadi H. ; Larivee, Brian J. ; Brown, Richard B.
Author_Institution :
Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
Integrated microsensors with an analog front-end enable trace metal detection. The 36 mm2 device is fabricated in a 5 V 0.5 μm CMOS process with the sensor layers post processed and dissipates 15 mW. A detection limit of 0.8 ppb for lead is attained using two 3×10-6 cm2 electrodes.
Keywords :
CMOS integrated circuits; chemical sensors; electrochemical electrodes; environmental degradation; health hazards; integrated circuit measurement; low-power electronics; pollution measurement; 0.5 micron; 15 mW; 5 V; CMOS process; Pb; analog front-end; electrode size; integrated microsensors; lead detection limit; microsystem; post processed sensor layers; power dissipation; trace environmental monitoring; trace metal detection; Chemical sensors; Cities and towns; Electrodes; Electronics packaging; Humans; Lead; Monitoring; Silver; Switches; Transducers;
Conference_Titel :
Solid-State Circuits Conference, 2005. Digest of Technical Papers. ISSCC. 2005 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-8904-2
DOI :
10.1109/ISSCC.2005.1493960
