• DocumentCode
    1670846
  • Title

    A 0.8 mA 50 Hz 15 b SNDR ΔΣ closed-loop 10g accelerometer using an 8th-order digital compensator

  • Author

    Condemine, C. ; Delorme, N. ; Soen, J. ; Durupt, J. ; Blanc, J.-P. ; Belleville, M. ; Besançon-Voda, A.

  • Author_Institution
    Electron. & Inf. Technol. Lab., Grenoble, France
  • fYear
    2005
  • Firstpage
    248
  • Abstract
    A ΣΔ-based closed-loop ±10g accelerometer providing 88 dB SNDR over a 50 Hz bandwidth is fabricated in a 19.4 mm2 die using 0.35 μm CMOS technology. A ΔΣ interface performs the readout, ADC and electrostatic actuation of the sensor, while an 8th-order digital compensator computes the actuation command.
  • Keywords
    accelerometers; capacitive sensors; compensation; electrostatic actuators; microsensors; sigma-delta modulation; ΣΔ-based closed-loop accelerometer; 0.35 micron; 0.8 mA; 15 bit; 50 Hz; ADC; CMOS technology; SNDR; SNDR ΔΣ closed-loop accelerometer; actuation command computation; bandwidth; capacitive comb accelerometer; eighth-order digital compensator; readout; sensor electrostatic actuation; sigma-delta interface; Accelerometers; Capacitance; Cutoff frequency; Electrodes; Electrostatics; Laboratories; Linearity; Mathematical model; Sampling methods; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference, 2005. Digest of Technical Papers. ISSCC. 2005 IEEE International
  • Conference_Location
    San Francisco, CA
  • ISSN
    0193-6530
  • Print_ISBN
    0-7803-8904-2
  • Type

    conf

  • DOI
    10.1109/ISSCC.2005.1493962
  • Filename
    1493962
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1670846