Title :
Fabrication of microlens arrays in polycarbonate with nanojoule energy femtosecond laser pulses
Author :
Meunier, Trevor ; Weck, Arnaud
Author_Institution :
Mech. Eng. Dept., Univ. of Ottawa, Ottawa, ON, Canada
Abstract :
Microlens arrays were fabricated by focusing a high repetition rate femtosecond laser with low energy pulses inside polycarbonate samples. The microlens was imaged in a scanning electron microscope and was optically characterized using a HeNe laser. It was found that the microlens has a diameter of 80 μm, a focal length of 100 μm, a numerical apperture of 0.63 and a spot diameter of 1.2 μm. Additionally, we found that a void is created under the microlens.
Keywords :
gas lasers; helium compounds; microlenses; optical fabrication; optical focusing; scanning electron microscopes; HeNe; high repetition rate femtosecond laser focusing; microlens arrays fabrication; polycarbonate; scanning electron microscope; size 1.2 mum; size 100 mum; size 80 mum; Laser beams; Lenses; Microoptics; Optical imaging; Scanning electron microscopy; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4673-1839-6
