• DocumentCode
    1672092
  • Title

    Optical and electrical properties of indium oxide thin films as transparent electrode to indium phosphide

  • Author

    Hseih, Chunhan ; Ou, Fang ; Yi, Fei ; Ho, Seng-Tiong

  • Author_Institution
    Dept. of Electr. Eng. & Comput. Sci., Northwestern Univ., Evanston, IL, USA
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We investigate the optical and electrical properties of indium oxide (In2O3) thin films deposited by ion beam assisted deposition (IAD). Results show promising potentials of In2O3 as transparent electrodes for InP based optoelectronic devices.
  • Keywords
    Hall mobility; indium compounds; infrared spectra; ion beam assisted deposition; thin films; ultraviolet spectra; visible spectra; In2O3; electrical properties; indium phosphide; ion beam assisted deposition; optical properties; optoelectronic devices; thin films; transparent electrode; Contacts; Indium phosphide; Optical attenuators; Optical films; Optical reflection; Optical refraction; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6326359
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1672092