Title :
The design and development of a novel VLSI-CAM system
Author :
Xiang, Cailan ; Cheng, Tianmn ; Zeng, Quan ; Fu, Jianjun ; Huang, Jian
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
This paper reports a novel VLSI Computer Aided Manufacturing (VLSI-CAM) system designed and developed in China. The VLSI-CAM system framework, process model of IC fabrication, the rule for the IC production scheduling and the quality control are discussed in the paper. A few IC factories have adopted the VLSI-CAM system with success
Keywords :
CAD/CAM; VLSI; electronic engineering computing; integrated circuit manufacture; production engineering computing; quality control; scheduling; semiconductor process modelling; CAM system framework; China; IC fabrication; IC production scheduling; VLSI CAM system; computer aided manufacturing; process model; quality control; Computer aided manufacturing; Costs; Fabrication; Integrated circuit modeling; Job shop scheduling; Manufacturing processes; Production systems; Quality control; Semiconductor device modeling; Very large scale integration;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 1995 4th International Conference on
Conference_Location :
Beijing
Print_ISBN :
0-7803-3062-5
DOI :
10.1109/ICSICT.1995.500066
