National technology roadmaps: the U.S. semiconductor experience

Behind the projection for the technology for the next 15 years are complete roadmaps for each of the major technologies in support of the manufacture of silicon integrated circuits. This work was the result of hundreds of scientists and engineers from universities, industry, and government working together to develop a set of industry requirements for silicon technology. The history of this roadmap process, the methods used to develop the National Technology Roadmap for Semiconductors, some of the overall requirements of the Roadmap, and finally, some suggestions for international cooperation and roadmaps in other technologies are the subject of this paper