DocumentCode
1672307
Title
Stability in growth of 6H-SiC and 3C-SiC for LEDs and solar cells
Author
Jokubavicius, Valdas ; Liljedahl, Rickard ; Yakimova, Rositza ; Syväjärvi, Mikael
Author_Institution
Dept. of Phys., Chem. & Biol., Linkoping Univ., Linköping, Sweden
fYear
2012
Firstpage
1
Lastpage
2
Abstract
6H- and 3C-SiC layers were grown using a sublimation based process. The polytype balance is mainly given by the substrate orientation and growth temperature. This paves the way to use 6H- and 3C-SiC in optoelectronic applications.
Keywords
epitaxial growth; light emitting diodes; semiconductor growth; silicon compounds; solar cells; sublimation; substrates; wide band gap semiconductors; 3C-SiC growth; 6H-SiC growth; LED; SiC; growth temperature; optoelectronic applications; polytype balance; solar cells; sublimation based process; substrate orientation; Boron; Nitrogen; Photovoltaic cells; Silicon carbide; Substrates; Thermal stability;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2012 Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-4673-1839-6
Type
conf
Filename
6326368
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