Title :
E3 RF MEMS: fact or stiction
Author :
Cioffi, Ken ; Puers, Bob
Keywords :
Costs; Inductors; Integrated circuit technology; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Resonator filters; Surface acoustic waves; Switches; Varactors;
Conference_Titel :
Solid-State Circuits Conference, 2005. Digest of Technical Papers. ISSCC. 2005 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-8904-2
DOI :
10.1109/ISSCC.2005.1494022
