DocumentCode
1672351
Title
E3 RF MEMS: fact or stiction
Author
Cioffi, Ken ; Puers, Bob
fYear
2005
Firstpage
368
Lastpage
369
Keywords
Costs; Inductors; Integrated circuit technology; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Resonator filters; Surface acoustic waves; Switches; Varactors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 2005. Digest of Technical Papers. ISSCC. 2005 IEEE International
Conference_Location
San Francisco, CA
ISSN
0193-6530
Print_ISBN
0-7803-8904-2
Type
conf
DOI
10.1109/ISSCC.2005.1494022
Filename
1494022
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