Title :
A 3 GHZ, 144 point probe future for automatic IC wafer testing
Author :
Hamling, Daniel T.
Abstract :
A probe fixture for manufacturing has been developed that addresses the need for high speed automatic wafer testing of medium to high pad count ICs. The probe fixture enhibits a bandwidth of 3.2 GHz and a maximum probe count of 144 as well as other useful capabilities. The probe fixture and test system description, perfomance capabilities, and practical demonstration are discussed.
Keywords :
Automatic testing; Bandwidth; Circuit testing; Clamps; Fixtures; High speed integrated circuits; Integrated circuit testing; Manufacturing automation; Probes; System testing;
Conference_Titel :
Test Conference, 1992. Proceedings., International
Conference_Location :
Baltimore, MD
Print_ISBN :
0-7803-0760-7
DOI :
10.1109/TEST.1992.527921
