Title :
Modeling The Electromagnetic Fields And The Plasma Excitation In Moderate Pressure Microwave Cavity Plasma Sources
Author :
Tan, Wei ; Grotjohn, Timothy A.
Author_Institution :
Midugan State University
Keywords :
Electromagnetic fields; Electromagnetic modeling; Plasma applications; Plasma density; Plasma materials processing; Plasma measurements; Plasma properties; Plasma simulation; Plasma sources; Plasma transport processes;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588685
