DocumentCode :
1673053
Title :
Modeling The Electromagnetic Fields And The Plasma Excitation In Moderate Pressure Microwave Cavity Plasma Sources
Author :
Tan, Wei ; Grotjohn, Timothy A.
Author_Institution :
Midugan State University
fYear :
1994
Firstpage :
77
Lastpage :
77
Keywords :
Electromagnetic fields; Electromagnetic modeling; Plasma applications; Plasma density; Plasma materials processing; Plasma measurements; Plasma properties; Plasma simulation; Plasma sources; Plasma transport processes;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
ISSN :
0730-9244
Print_ISBN :
0-7803-2006-9
Type :
conf
DOI :
10.1109/PLASMA.1994.588685
Filename :
588685
Link To Document :
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