Impact of structure parameters and operation conditions on performance of nanoscale BioFET

With the scaling down of the MOSFET, nanoscale BioFET will be given particular attention to in the future. Different factors impacting the performance of nanoscale BioFET are presented in this paper. A numerical program is developed and different factors influencing the performance of BioFET are discussed. It is shown that parameters in field-effect-transistor and electrolyte, including doping concentrations, insulator thickness, ionic concentration, solution pH, bias voltage, and the density of DNA series affect the drain current. The Signal-to-Noise Ratio (SNR) is also affected by the structure parameters and operation conditions.