Title :
A programmable electrochemical biosensor array in 0.18 μm standard CMOS
Author :
Hassibi, Arjang ; Lee, Thomas H.
Author_Institution :
Stanford Univ., CA, USA
Abstract :
A 10×5 electrochemical biosensor array is designed and fabricated in standard 0.18 μm CMOS. Each pixel occupies 160×120 μm2 and contains a programmable sensor capable of performing differential impedance spectroscopy, amperometric analysis, and field-effect sensing for molecular biology applications.
Keywords :
CMOS integrated circuits; amperometric sensors; biosensors; electrochemical sensors; integrated circuit design; microsensors; molecular biophysics; programmable circuits; 0.18 micron; 120 micron; 160 micron; amperometric analysis; differential impedance spectroscopy; field-effect sensing; molecular biology; programmable electrochemical biosensor array; programmable sensor; standard CMOS; Biosensors; CMOS process; Costs; DNA; Electrodes; Fabrication; Probes; Proteins; Sensor arrays; Transducers;
Conference_Titel :
Solid-State Circuits Conference, 2005. Digest of Technical Papers. ISSCC. 2005 IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-8904-2
DOI :
10.1109/ISSCC.2005.1494120
