Rigorous 3D EM simulation and an efficient approximate model of MMIC overlay capacitors with multiple feedpoints

A systematic 3D electromagnetic (EM) analysis of metal-insulator-metal (MIM)-capacitors with up to four feedstrips has been performed to investigate the electrical effects of feed widths and positions. Based on this analysis, an efficient approximate computer-aided design (CAD) model of MIM-capacitor N-ports has been developed which is an extension and generalization of a recently published two-port model. The proposed model has a very high computation speed, suitable for interactive CAD. The model includes feeding effects which can be crucial at higher frequencies and thus represents an improvement of the state-of-the-art of modeling for an important class of passive monolithic microwave integrated circuit (MMIC) components.<>