Title :
A 2.47 GHz ultra NanoCrystaline diamond disk resonator with temperature compensation for RF application
Author :
Junghare, Rajesh C. ; Pachkawade, Vinayak ; Patrikar, Rajendra M.
Author_Institution :
Centre for VLSI & Nanotechnol., Visvesvaraya Nat. Inst. of Technol., Nagpur, India
Abstract :
This paper presents a 2.47 GHz capacitively transduced micromechanical disk resonator based on a Wine Glass mode of vibration. An ultra nano-crystalline diamond (UNCD) material has been used to achieve high frequency-quality factor (f.Q) product for RF applications, since this material provides highest young´s modulus up to 1000 GPa and therefore highest acoustic velocity of 15000 m/s. Mode shape and frequency of the device has been confirmed first by numerical modeling and thereafter simulated using COMSOL multyphysics. COVENTORWARE has been used to simulate fabrication flow of the structure. Furthermore, this disc resonator device is shown to be temperature compensated achieving TCF of 2.5 ppm/K with TiO2 dielectric coating and TCF of 8.5 ppm/K for SiO2 dielectric coating.
Keywords :
UHF resonators; compensation; dielectric materials; micromechanical resonators; nanostructured materials; silicon compounds; titanium compounds; COMSOL multyphysics; COVENTORWARE; SiO2 dielectric coating; SiO2; TCF; TiO2 dielectric coating; TiO2; UNCD material; acoustic velocity; capacitively transduced micromechanical disk resonator; disc resonator device; fabrication flow; frequency 2.47 GHz; high frequency-quality factor product; mode frequency; mode shape; numerical modeling; pressure 1000 GPa; ultra nanocrystalline diamond material; velocity 15000 m/s; vibration; wine glass mode; young´s modulus; Diamonds; Electrodes; Fabrication; Films; Plasma temperature; Resonant frequency; Temperature dependence;
Conference_Titel :
VLSI Design and Test (VDAT), 2015 19th International Symposium on
Conference_Location :
Ahmedabad
Print_ISBN :
978-1-4799-1742-6
DOI :
10.1109/ISVDAT.2015.7208119
