Title :
A feedback limitation of decentralized controllers for TITO systems, with application to a reactive ion etcher
Author :
Freudenberg, J.S. ; Grizzle, J.W. ; Rashap, B.A.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
This paper explores an inherent feedback limitation of using decentralized LTI control on a two-input, two-output LTI plant. The result is motivated by, and illustrated on, a reactive ion etcher
Keywords :
MIMO systems; decentralised control; electronics industry; feedback; multivariable control systems; semiconductor device manufacture; sputter etching; MIMO systems; decentralized controllers; feedback limitation; inherent feedback limitation; reactive ion etcher; two-input two-output LTI plant; Actuators; Centralized control; Chemical processes; Computer aided manufacturing; Control systems; Etching; Feedback; Plasma applications; Power system modeling; Semiconductor device noise;
Conference_Titel :
Decision and Control, 1994., Proceedings of the 33rd IEEE Conference on
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
0-7803-1968-0
DOI :
10.1109/CDC.1994.411472
