Title :
A computer aided test system for the analysis of oxide trap relaxation spectroscopy of MOS device (OTRS CAT system)
Author :
Zhiyun, Chen ; Xiaowei, Liu ; Yandong, He ; Xiaorong, Duan ; Mingzhen, Xu ; Changhua, Tan
Author_Institution :
Inst. of Microelectron., Beijing Univ., China
Abstract :
When device dimension in current ICs is down to sub-micron realm, the oxide layer reliability under high field becomes more and more important in determining device lifetime. This CAT system is devised to test and analyze trap behaviour under high stress and thus evaluates the quality of oxide layer. Its intended users are industry field engineers and its main purpose is to be used in the degradation test after manufacture to determine potential damages that may caused by usage
Keywords :
MOS integrated circuits; VLSI; automatic testing; electron traps; integrated circuit reliability; integrated circuit testing; life testing; CAT system; MOS ICs; OTRS; computer aided test system; degradation test; device lifetime; oxide layer reliability; oxide trap relaxation spectroscopy; sub-micron realm; Automatic testing; Data analysis; Decision support systems; Degradation; MOS devices; Sampling methods; Software testing; Spectroscopy; Stress; System testing;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 1995 4th International Conference on
Conference_Location :
Beijing
Print_ISBN :
0-7803-3062-5
DOI :
10.1109/ICSICT.1995.500187
