• DocumentCode
    1677769
  • Title

    A MMIC compatible coupled line structure that uses embedded microstrip to achieve extremely tight couplings

  • Author

    Willems, D. ; Bahl, I.

  • Author_Institution
    ITT Gallium Arsenide Technol. Center, Roanoke, VA, USA
  • fYear
    1993
  • Firstpage
    581
  • Abstract
    The authors present a highly manufacturable coupled line structure for MMICs (monolithic microwave integrated circuits) which uses embedded microstrip to achieve tight coupling and only uses the process steps necessary to make MIM (metal-insulator-metal) capacitors. Passive circuits demonstrated using this technique include a single-section 5-21-GHz broadband 3-dB coupler and a 6-15-GHz 90 degrees Schiffman section. The coupler and the Schiffman section use tight (2-dB) to extremely tight (0.7-dB) coupling factors, respectively. This is the first time that a coupler has achieved such a wide bandwidth on a 125- mu m-thick GaAs substrate.<>
  • Keywords
    MMIC; microstrip components; microstrip lines; waveguide couplers; 125 micron; 5 to 21 GHz; 6 to 15 GHz; GaAs substrate; MIM capacitors; MMIC compatible coupled line structure; Schiffman section; embedded microstrip; extremely tight couplings; passive circuits; single section broadband coupler; wide bandwidth; Coupling circuits; Integrated circuit manufacture; MIM capacitors; MMICs; Manufacturing processes; Metal-insulator structures; Microstrip; Microwave integrated circuits; Monolithic integrated circuits; Passive circuits;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Symposium Digest, 1993., IEEE MTT-S International
  • Conference_Location
    Atlanta, GA, USA
  • ISSN
    0149-645X
  • Print_ISBN
    0-7803-1209-0
  • Type

    conf

  • DOI
    10.1109/MWSYM.1993.276871
  • Filename
    276871