Title :
A MMIC compatible coupled line structure that uses embedded microstrip to achieve extremely tight couplings
Author :
Willems, D. ; Bahl, I.
Author_Institution :
ITT Gallium Arsenide Technol. Center, Roanoke, VA, USA
Abstract :
The authors present a highly manufacturable coupled line structure for MMICs (monolithic microwave integrated circuits) which uses embedded microstrip to achieve tight coupling and only uses the process steps necessary to make MIM (metal-insulator-metal) capacitors. Passive circuits demonstrated using this technique include a single-section 5-21-GHz broadband 3-dB coupler and a 6-15-GHz 90 degrees Schiffman section. The coupler and the Schiffman section use tight (2-dB) to extremely tight (0.7-dB) coupling factors, respectively. This is the first time that a coupler has achieved such a wide bandwidth on a 125- mu m-thick GaAs substrate.<>
Keywords :
MMIC; microstrip components; microstrip lines; waveguide couplers; 125 micron; 5 to 21 GHz; 6 to 15 GHz; GaAs substrate; MIM capacitors; MMIC compatible coupled line structure; Schiffman section; embedded microstrip; extremely tight couplings; passive circuits; single section broadband coupler; wide bandwidth; Coupling circuits; Integrated circuit manufacture; MIM capacitors; MMICs; Manufacturing processes; Metal-insulator structures; Microstrip; Microwave integrated circuits; Monolithic integrated circuits; Passive circuits;
Conference_Titel :
Microwave Symposium Digest, 1993., IEEE MTT-S International
Conference_Location :
Atlanta, GA, USA
Print_ISBN :
0-7803-1209-0
DOI :
10.1109/MWSYM.1993.276871
