Title :
High Charge State Metal Ion Production In Vacuum Arc Ion Sources
Author :
Brown, I.G. ; Anders, Andre ; Anders, Solveig
Author_Institution :
Lawrence Berkeley Laboratory
Keywords :
Boron; Cathodes; Ion implantation; Ion sources; Plasma applications; Plasma immersion ion implantation; Plasma materials processing; Plasma sources; Production; Vacuum arcs;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588704
