DocumentCode
1678237
Title
Metal Vapor Vacuum Arc Ion Sources For Implantation And Plasma Processing
Author
Humphries, S., Jr. ; Lockner, T.R.
Author_Institution
Arc Engineering
fYear
1994
Firstpage
84
Lastpage
84
Keywords
Boron; Cathodes; Ion sources; Plasma applications; Plasma density; Plasma immersion ion implantation; Plasma materials processing; Plasma properties; Plasma sources; Vacuum arcs;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.588705
Filename
588705
Link To Document