Title :
Inductively Coupled Plasma And Ion Sources: History And State-of-the-art
Author :
Hopwood, Jeffrey
Author_Institution :
Northeastern University
Keywords :
Coils; Electromagnetic coupling; History; Ion sources; Optical coupling; Plasma applications; Plasma density; Plasma properties; Plasma sources; Power generation;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588706
