Title :
The Development of an Ultra-precision Dual-stage Based on a Master-Slave Control System
Author :
Hou, Bo-jie ; Gao, Jian-she ; Zhou, Yun-fei
Author_Institution :
Sch. of Mech. Eng., Zhengzhou Univ., Zhengzhou, China
Abstract :
A ultra-precision dual-stage based on a master-slave control mode is presented to meet the demand for nanometer level accuracy in this paper. The dual-stage is constructed with a linear motor and a Lorentz motor. By adopting the air bearing, both linear motor and Lorentz motor are regarded as a double differential system respectively. The coupling system of two stages has been decoupled. The "PID + feedforward" control structure is adopted. Nanometer level positioning accuracy and high moving speed are achieved. The experimental results are provided.
Keywords :
feedforward; linear motors; machine bearings; motion control; nanopositioning; three-term control; Lorentz motor; PID+feedforward control structure; air bearing; coupling system; double differential system; linear motor; master-slave control system; moving speed; nanometer level accuracy; nanometer level positioning accuracy; ultra-precision dual-stage development; Accuracy; Actuators; Couplings; Master-slave; Permanent magnet motors; Synchronous motors; Decouple; High speed/accuracy; Linear motor; Lorentz motor; Master-slave control; Ultra-precision dual-stage;
Conference_Titel :
Computer Distributed Control and Intelligent Environmental Monitoring (CDCIEM), 2012 International Conference on
Conference_Location :
Hunan
Print_ISBN :
978-1-4673-0458-0
DOI :
10.1109/CDCIEM.2012.177
