Title :
Ecr Ion/free-radical Plasma Source Simulation In Two And Three Dimensions
Author :
Gopinath, V. ; Grotjohn, T.A.
Author_Institution :
Michigan State University
Keywords :
Breakdown voltage; Electromagnetic fields; Electromagnetic modeling; Electrons; Fault location; Numerical models; Partial discharges; Plasma applications; Plasma simulation; Plasma sources;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588710
