Microhardness analysis of diamond like carbon films

Author

Rabinovitch, E. ; Axelevitch, A. ; Golan, G. ; Klibanov, L. ; Croitoru, N. ; Seidman, A.

Author_Institution

Center for Technol. Educ., Holon, Israel

fYear

1996

Firstpage

452

Lastpage

455

Abstract

Microhardness analysis of Diamond-Like Carbon (DLC) films deposited by PECVD, using R.F. generator was carried out. This analysis was realized by a standard tester PMT-3 which consists of a flat field optical microscope and a diamond stylus probe. Vickers indentation measurements were done with constant loads of: 10 g, 20 g, 30 g, 50 g, 60 g and 70 g in a continuous pressure. It was shown that microhardness results of the DLC thin films are strongly dependent on the methodological principles of the measurement technique and instrumentation. An iterations method was used in order to choose the correct load value. Every loading was accompanied with a metallographical control of the indentor´s stamps quality. Best results were obtained for 10 g, 20 g and 30 g loads. The analysis is based on the empirical approach and the “cavity model” of the indentation hardness

Keywords

carbon; hardness testing; microhardness; plasma CVD coatings; C; PECVD; PMT-3 tester; RF generator; Vickers indentation; cavity model; diamond like carbon film; diamond stylus probe; flat field optical microscope; iteration; metallographical control; microhardness measurement; stamp quality; Diamond-like carbon; Instruments; Nitrogen; Optical films; Optical microscopy; Plasma measurements; Plasma temperature; Substrates; Testing; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Electronics Engineers in Israel, 1996., Nineteenth Convention of

Conference_Location

Jerusalem

Print_ISBN

0-7803-3330-6

Type

conf

DOI

10.1109/EEIS.1996.567013

Filename

567013