High-speed and Large-range scanning control of a piezoelectric stack actuated platform *

In this paper, high-speed, large-range scanning control of piezoelectric stack actuated platform is discussed. In order to obtain preferable tracking control, an inverse Modified Prandtl-Ishlinskii model (MPI) is first established to reduce hysteresis nonlinearity. Then, a second order linear model is identified and a polynomial-based damping controller is designed to damp the first resonant frequency of system. Finally, the design strategy is applied to the motion control of a nanopositioning platform, and simulate results are presented to verify the usefulness of this method.