• DocumentCode
    1683687
  • Title

    Computer Simulation Of Ion Implantation

  • Author

    Amin, Adnan ; Kim, Hyun-Suk ; Yi, Sang-Hwa ; Lonngren, K.E. ; Alexeff, I.

  • Author_Institution
    University ofTennessee
  • fYear
    1994
  • Firstpage
    92
  • Lastpage
    92
  • Keywords
    Application software; Computer simulation; Electrons; Ion implantation; Plasma applications; Plasma immersion ion implantation; Plasma materials processing; Plasma sheaths; Plasma simulation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
  • Conference_Location
    Santa Fe, NM, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-2006-9
  • Type

    conf

  • DOI
    10.1109/PLASMA.1994.588732
  • Filename
    588732
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1683687