Title :
Factors Affecting The Plasma Ion Implantation Of Metallic Samples
Author :
Kamath, S. ; Roth, J.R.
Author_Institution :
University of Tennessee
Keywords :
Corrosion; Ion implantation; Laboratories; Nuclear and plasma sciences; Plasma applications; Plasma chemistry; Plasma immersion ion implantation; Plasma materials processing; Plasma properties; Plasma sheaths;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588734
