• DocumentCode
    1683770
  • Title

    Cost Estimates For Commercial Plasma Source Ion Implantation

  • Author

    Rej, D.J. ; Alexander, R.B.

  • Author_Institution
    Los Alamos National Laboratory
  • fYear
    1994
  • Firstpage
    94
  • Lastpage
    95
  • Keywords
    Costs; Inductors; Ion implantation; Laboratories; Plasma chemistry; Plasma confinement; Plasma immersion ion implantation; Plasma sources; Plasma transport processes; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
  • Conference_Location
    Santa Fe, NM, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-2006-9
  • Type

    conf

  • DOI
    10.1109/PLASMA.1994.588737
  • Filename
    588737
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1683770