Title :
Cost Estimates For Commercial Plasma Source Ion Implantation
Author :
Rej, D.J. ; Alexander, R.B.
Author_Institution :
Los Alamos National Laboratory
Keywords :
Costs; Inductors; Ion implantation; Laboratories; Plasma chemistry; Plasma confinement; Plasma immersion ion implantation; Plasma sources; Plasma transport processes; Substrates;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588737
