DocumentCode

1683847

Title

Numerical Study Of Capacitive And Inductive Modes In RPECVD Reactors

Author

Peres, I. ; Kushner, Mark J.

Author_Institution

University of Illinois

fYear

1994

Firstpage

94

Lastpage

94

Keywords

Coils; Fabrication; Inductors; Plasma chemistry; Plasma confinement; Plasma density; Plasma sources; Plasma temperature; Plasma transport processes; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on

Conference_Location

Santa Fe, NM, USA

ISSN

0730-9244

Print_ISBN

0-7803-2006-9

Type

conf

DOI

10.1109/PLASMA.1994.588740

Filename

588740