Title :
Numerical Study Of Capacitive And Inductive Modes In RPECVD Reactors
Author :
Peres, I. ; Kushner, Mark J.
Author_Institution :
University of Illinois
Keywords :
Coils; Fabrication; Inductors; Plasma chemistry; Plasma confinement; Plasma density; Plasma sources; Plasma temperature; Plasma transport processes; Substrates;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588740
