Title :
Analysis Of Closed-form EM Modes And Reactor Geometries For Inductively Coupled Plasma Sources
Author :
Fa Dai ; Chwan-Hwa Wu
Author_Institution :
Auburn University,
Keywords :
Coils; Coupled mode analysis; Electrons; Geometry; Inductors; Plasma applications; Plasma measurements; Plasma sources; Radio frequency; Solid modeling;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588742
