Title :
Fluid PIC Simulation Of Plasma Processing Devices
Author :
Lapenta, G. ; Brackbill, J.U.
Author_Institution :
University of California
Keywords :
Apertures; Electrons; Helical antennas; Inductors; Plasma applications; Plasma density; Plasma devices; Plasma materials processing; Plasma measurements; Plasma simulation;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588745
