DocumentCode
1683989
Title
Parametric Studies Of Electron-energy -distribution-function And Rate Constants For Plasma-etching Reactors
Author
Shon, J.W. ; Meeks, E. ; Kee, R.J.
Author_Institution
Sandia National Laboratories
fYear
1994
Firstpage
96
Lastpage
96
Keywords
Antenna measurements; Apertures; Electrons; Helical antennas; Inductors; Laboratories; Plasma applications; Plasma density; Plasma materials processing; Plasma measurements;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.588746
Filename
588746
Link To Document