Title :
Density Enhancement In Helicon Sources By Aperture Control
Author :
Sudit, I.D. ; Chen, Francis F.
Author_Institution :
UCLA
Keywords :
Antenna measurements; Apertures; Boron; Helical antennas; Ionization; Magnetic materials; Plasma density; Plasma materials processing; Plasma measurements; Plasma waves;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588748