DocumentCode :
1684233
Title :
Effects Of Selected Process Parameters The Properties Of TiN Coatings Produced Plasma-CVD
Author :
Lasorsa, C. ; Shimozuma, M. ; Rodrigo, Alvaro
Author_Institution :
Comision National de Energia Atomica
fYear :
1994
Firstpage :
100
Lastpage :
100
Keywords :
Biomedical electrodes; Chemical technology; Coatings; Educational institutions; Geometrical optics; Inductors; Physics; Plasma chemistry; Plasma properties; Tin;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
ISSN :
0730-9244
Print_ISBN :
0-7803-2006-9
Type :
conf
DOI :
10.1109/PLASMA.1994.588760
Filename :
588760
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1684233
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