DocumentCode

1684233

Title

Effects Of Selected Process Parameters The Properties Of TiN Coatings Produced Plasma-CVD

Author

Lasorsa, C. ; Shimozuma, M. ; Rodrigo, Alvaro

Author_Institution

Comision National de Energia Atomica

fYear

1994

Firstpage

100

Lastpage

100

Keywords

Biomedical electrodes; Chemical technology; Coatings; Educational institutions; Geometrical optics; Inductors; Physics; Plasma chemistry; Plasma properties; Tin;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on

Conference_Location

Santa Fe, NM, USA

ISSN

0730-9244

Print_ISBN

0-7803-2006-9

Type

conf

DOI

10.1109/PLASMA.1994.588760

Filename

588760