FTIR spectroscopy Measurements 0f CF/sub 4/ and C/sub 2/ F/sub 6/ concentrations In a planar rf Inductively-coupled Plasma

Author

Mahoney, L.J. ; Yulke, S.G. ; Shohet, J.L. ; Goeckner, M.J.

Author_Institution

University of Wisconsin

fYear

1994

Firstpage

109

Lastpage

109

Keywords

Discharges; Feeds; Fluid flow; Polyethylene; Radio frequency; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on

Conference_Location

Santa Fe, NM, USA

ISSN

0730-9244

Print_ISBN

0-7803-2006-9

Type

DOI

10.1109/PLASMA.1994.588790

Filename

588790

Link To Document