Title :
Readout interface for capacitive MEMS microphone in CMOS technology
Author :
Arbet, Daniel ; Nagy, Gabriel ; Kovac, Martin ; Stopjakova, Viera ; Nagy, Lukas
Author_Institution :
Inst. of Electron. & Photonics, Slovak Univ. of Technol., Bratislava, Slovakia
Abstract :
This paper presents the frontend part of the readout interface for a capacitive MEMS microphone designed and fabricated in 0.35 μm CMOS technology. The developed readout interface will be used in a noise dosimeter applicable in very noisy and harsh environment. The prototype chips were measured and the main parameters evaluated. The achieved results demonstrate low harmonic distortion, low noise and high dynamic range of the developed readout interface.
Keywords :
CMOS integrated circuits; capacitive sensors; microphones; microsensors; readout electronics; CMOS technology; capacitive MEMS microphone; noise dosimeter; readout interface; size 0.35 mum; Distortion measurement; Frequency measurement; Micromechanical devices; Microphones; Noise; Noise measurement; Semiconductor device measurement; MEMS microphone; Readout interface; fully differential difference amplifier; high dynamic range; low harmonic distortion; low noise;
Conference_Titel :
Mixed Design of Integrated Circuits & Systems (MIXDES), 2015 22nd International Conference
Conference_Location :
Torun
Print_ISBN :
978-8-3635-7806-0
DOI :
10.1109/MIXDES.2015.7208545
