DocumentCode
1686018
Title
Readout interface for capacitive MEMS microphone in CMOS technology
Author
Arbet, Daniel ; Nagy, Gabriel ; Kovac, Martin ; Stopjakova, Viera ; Nagy, Lukas
Author_Institution
Inst. of Electron. & Photonics, Slovak Univ. of Technol., Bratislava, Slovakia
fYear
2015
Firstpage
370
Lastpage
374
Abstract
This paper presents the frontend part of the readout interface for a capacitive MEMS microphone designed and fabricated in 0.35 μm CMOS technology. The developed readout interface will be used in a noise dosimeter applicable in very noisy and harsh environment. The prototype chips were measured and the main parameters evaluated. The achieved results demonstrate low harmonic distortion, low noise and high dynamic range of the developed readout interface.
Keywords
CMOS integrated circuits; capacitive sensors; microphones; microsensors; readout electronics; CMOS technology; capacitive MEMS microphone; noise dosimeter; readout interface; size 0.35 mum; Distortion measurement; Frequency measurement; Micromechanical devices; Microphones; Noise; Noise measurement; Semiconductor device measurement; MEMS microphone; Readout interface; fully differential difference amplifier; high dynamic range; low harmonic distortion; low noise;
fLanguage
English
Publisher
ieee
Conference_Titel
Mixed Design of Integrated Circuits & Systems (MIXDES), 2015 22nd International Conference
Conference_Location
Torun
Print_ISBN
978-8-3635-7806-0
Type
conf
DOI
10.1109/MIXDES.2015.7208545
Filename
7208545
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