A study on microbolometer electro-thermal circuit modelling

Author

Nazdrowicz, Jacek ; Szermer, Michal ; Maj, Cezary ; Zabierowski, Wojciech ; Napieralski, Andrzej

Author_Institution

Dept. of Microelectron. & Comput. Sci., Lodz Univ. of Technol., Lodz, Poland

fYear

2015

Firstpage

458

Lastpage

463

Abstract

Electro-thermal models are commonly used in simulations and designing MEMS devices, also in case of microbolometers. These models allow to estimate sensors performance before fabrication that consequently impacts on fabrication cost. Coupling of electric and thermal domains and building appropriate model for carrying out simulations are crucial to detect all phenomena having impact for Readout Integrated Circuit. This article brings closer to the subject matter of circuit modelling (willingly implemented in MATLAB/SIMULINK or PSPICE tools) and to its theoretical background.

Keywords

bolometers; integrated circuit modelling; micromechanical devices; readout electronics; MATLAB/SIMULINK implementation; MEMS devices; PSPICE tools; electrothermal circuit modelling; microbolometers; readout integrated circuit; Detectors; Heating; Integrated circuit modeling; Noise; Thermal conductivity; Thermal resistance; circuit modelling; electrothermal modelling; microbolometer;

fLanguage

English

Publisher

ieee

Conference_Titel

Mixed Design of Integrated Circuits & Systems (MIXDES), 2015 22nd International Conference

Conference_Location

Torun

Print_ISBN

978-8-3635-7806-0

Type

conf

DOI

10.1109/MIXDES.2015.7208563

Filename

7208563