Study of ZnO thin film on silicon substrate by sol-gel spin coating method for bio-medical application

Author

Foo, K.L. ; Kashif, M. ; Hashim, U. ; Ali, Syed M Usman ; Willander, M.

Author_Institution

Nano Biochip Res. Group, Univ. Malaysia Perlis, Kangar, Malaysia

fYear

2012

Firstpage

223

Lastpage

226

Abstract

Transparent semiconductor ZnO thin films deposited on p-Si (100) substrates with different solvent (Methanol and Ethanol) were obtained by sol-gel method. The coated ZnO films were annealed in furnace at 500°C for 2 hours. The influence of surface morphologies, surface roughness, I-V characteristic, crystallization and optical properties with different solvent was investigated. The structural properties of the annealed ZnO films were examined with AFM and XRD. UV-Vis was employed to study the optical properties of the ZnO thin films and the electrical characteristics were obtained by I-V curve tracer. XRD result shows that all polycrystalline ZnO thin film after annealing have the orientation along the (002) plane. The ZnO thin film deposited with methanol solvent provide better transmittance if compared to the ethanol solvent. The deposited ZnO thin film will further use for bio-molecular detection with the idea of immobilization and hybridization of the DNA on the ZnO thin film.

Keywords

DNA; II-VI semiconductors; X-ray diffraction; annealing; atomic force microscopy; biomedical materials; semiconductor thin films; silicon; sol-gel processing; spin coating; surface morphology; surface roughness; transparency; wide band gap semiconductors; zinc compounds; AFM analysis; DNA hybridization; DNA immobilization; I-V characteristic; Si; XRD analysis; ZnO; annealing; biomedical application; crystallization; furnace; methanol; silicon substrate; sol-gel spin coating; surface morphology; surface roughness; temperature 500 degC; time 2 hour; transmittance; transparent semiconductor thin films; DNA; Ethanol; Methanol; Optical films; Solvents; Zinc oxide; ZnO; ethanol; methanol; sol-gel; thin films;

fLanguage

English

Publisher

ieee

Conference_Titel

Biomedical Engineering (ICoBE), 2012 International Conference on

Conference_Location

Penang

Print_ISBN

978-1-4577-1990-5

Type

conf

DOI

10.1109/ICoBE.2012.6179009

Filename

6179009