Title :
Study Of Capacitive Rf Discharge Characteristics Through Particle Simulations
Author_Institution :
J. Watson Research Center
Keywords :
Electron emission; Geometry; Glow discharges; Heating; Kinetic theory; Plasma measurements; Plasma simulation; Poisson equations; Radio frequency; Stochastic processes;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588880
