DocumentCode
1686880
Title
Study Of Capacitive Rf Discharge Characteristics Through Particle Simulations
Author
Surendra, M.
Author_Institution
J. Watson Research Center
fYear
1994
Firstpage
136
Lastpage
136
Keywords
Electron emission; Geometry; Glow discharges; Heating; Kinetic theory; Plasma measurements; Plasma simulation; Poisson equations; Radio frequency; Stochastic processes;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.588880
Filename
588880
Link To Document