Title :
Electrical Characteristics Of Capacitive Rf Discharges Over A Wide Frequency Range
Author :
Godyak, V.A. ; Piejak, R.B. ; Alexandrovich, B.M.
Author_Institution :
OSRAM Sylvania Inc
Keywords :
Electric variables; Electrons; Plasma accelerators; Plasma density; Plasma materials processing; Plasma measurements; Plasma sources; Radio frequency; Spectroscopy; Switches;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588886
