DocumentCode
1687049
Title
Electrical Characteristics Of Capacitive Rf Discharges Over A Wide Frequency Range
Author
Godyak, V.A. ; Piejak, R.B. ; Alexandrovich, B.M.
Author_Institution
OSRAM Sylvania Inc
fYear
1994
Firstpage
138
Lastpage
138
Keywords
Electric variables; Electrons; Plasma accelerators; Plasma density; Plasma materials processing; Plasma measurements; Plasma sources; Radio frequency; Spectroscopy; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location
Santa Fe, NM, USA
ISSN
0730-9244
Print_ISBN
0-7803-2006-9
Type
conf
DOI
10.1109/PLASMA.1994.588886
Filename
588886
Link To Document