Fabrication of photonic crystal slabs and defects using laser interference lithography and focused ion beam-assisted deposition

Author

De Ridder, René M. ; Bostan, Cazimir G. ; Van Wolferen, Henk A G M ; Van Dorssen, Lnge ; Vogelaar, Laura ; Segerink, Frans B. ; Kuipers, Laurens ; Van Hulst, Niek F.

Author_Institution

Lightwave Devices Group, Twente Univ., Enschede, Netherlands

Volume

2

fYear

2002

fDate

6/24/1905 12:00:00 AM

Firstpage

14

Abstract

A method is described for fabricating photonic crystal slabs, using a combination of laser interference lithography for generating a regular periodic structure (the crystal lattice), and focused ion beam-assisted deposition for defining defects in this lattice, which may act as waveguides or resonators. As an example, results will be shown of a photonic crystal slab with a line defect in silicon nitride.

Keywords

crystal defects; ion beam assisted deposition; micro-optics; microcavities; optical fabrication; optical resonators; optical waveguides; photonic crystals; photoresists; silicon compounds; Si₃N₄; crystal lattice; defects; focused ion beam-assisted deposition; laser interference lithography; line defect; photonic crystal slab; photonic crystal slabs fabrication; regular periodic structure; resonators; silicon nitride; waveguides; Holographic optical components; Holography; Interference; Lithography; Optical device fabrication; Optical refraction; Optical resonators; Optical waveguides; Photonic crystals; Slabs;

fLanguage

English

Publisher

ieee

Conference_Titel

Transparent Optical Networks, 2002. Proceedings of the 2002 4th International Conference on

Print_ISBN

0-7803-7375-8

Type

conf

DOI

10.1109/ICTON.2002.1007836

Filename

1007836