Title :
Fabrication of photonic crystal slabs and defects using laser interference lithography and focused ion beam-assisted deposition
Author :
De Ridder, René M. ; Bostan, Cazimir G. ; Van Wolferen, Henk A G M ; Van Dorssen, Lnge ; Vogelaar, Laura ; Segerink, Frans B. ; Kuipers, Laurens ; Van Hulst, Niek F.
Author_Institution :
Lightwave Devices Group, Twente Univ., Enschede, Netherlands
fDate :
6/24/1905 12:00:00 AM
Abstract :
A method is described for fabricating photonic crystal slabs, using a combination of laser interference lithography for generating a regular periodic structure (the crystal lattice), and focused ion beam-assisted deposition for defining defects in this lattice, which may act as waveguides or resonators. As an example, results will be shown of a photonic crystal slab with a line defect in silicon nitride.
Keywords :
crystal defects; ion beam assisted deposition; micro-optics; microcavities; optical fabrication; optical resonators; optical waveguides; photonic crystals; photoresists; silicon compounds; Si3N4; crystal lattice; defects; focused ion beam-assisted deposition; laser interference lithography; line defect; photonic crystal slab; photonic crystal slabs fabrication; regular periodic structure; resonators; silicon nitride; waveguides; Holographic optical components; Holography; Interference; Lithography; Optical device fabrication; Optical refraction; Optical resonators; Optical waveguides; Photonic crystals; Slabs;
Conference_Titel :
Transparent Optical Networks, 2002. Proceedings of the 2002 4th International Conference on
Print_ISBN :
0-7803-7375-8
DOI :
10.1109/ICTON.2002.1007836
