Title :
Characterization Of A Microwave Cavity Plasma Reactor Under Large Area Diamond Film Deposition Conditions
Author :
Zhang, Juyong ; Asmussen, J.
Author_Institution :
Michigan State University
Keywords :
Fluid flow; Gases; Hydrogen; Inductors; Morphology; Plasma confinement; Plasma properties; Plasma temperature; Probes; Substrates;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588978
