Title :
Microwave Plasma Considerations Fur Cvd Of Diamond Films At Low Substrate Temperatures
Author :
Ulczynski, M. ; Reinhard, D.K. ; Prystajko, M. ; Asmussen, J.
Author_Institution :
Michigan State University
Keywords :
Atmospheric modeling; Atomic layer deposition; Atomic measurements; Diamond-like carbon; Inductors; Plasma chemistry; Plasma density; Plasma temperature; Plasma transport processes; Substrates;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588979
