Title :
Thermal Plasma Cvd Of Diamond: Relation Between Flow Velocity And Film Growth Chemistry
Author :
Girshick, Steven L. ; Yu, B.W.
Author_Institution :
University of Minnesota
Keywords :
Atmospheric modeling; Atomic layer deposition; Atomic measurements; Diamond-like carbon; Ion beams; Laboratories; Plasma chemistry; Plasma transport processes; Predictive models; Spectroscopy;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588980
