Title :
Copper Oxide Films Formed By Reactive Cathodic Arc Deposition
Author :
Anders, Solveig ; Anders, Andre ; Brown, I.G. ; MacGill, R.A. ; Dickinson, M.R. ; Castro, R.A.
Author_Institution :
Lawrence Berkeley Laboratory
Keywords :
Cathodes; Coatings; Copper; Laboratories; Plasma immersion ion implantation; Plasma materials processing; Plasma properties; Plasma sources; Radio frequency; Substrates;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588983
