Title :
Recent Results From A Large-scale Plasma Source Ion Implantation Experiment
Author :
Wood, B.P. ; Henins, I. ; Reass, William A. ; Faehl, R.J. ; Rej, D.J. ; Nastasi, M.A. ; Walter, K.C.
Author_Institution :
Los Alamos National Laboratory,
Keywords :
Electron beams; Glass; Ion implantation; Large-scale systems; Plasma accelerators; Plasma immersion ion implantation; Plasma properties; Plasma sources; Pulse modulation; Silicon;
Conference_Titel :
Plasma Science, 1994. Conference Record - Abstracts., 1994 IEEE International Conference on
Conference_Location :
Santa Fe, NM, USA
Print_ISBN :
0-7803-2006-9
DOI :
10.1109/PLASMA.1994.588984
