DocumentCode :
1688969
Title :
Memory Repair by Die Stacking with through Silicon Vias
Author :
Chou, Yung-Fa ; Kwai, Ding-Ming ; Wu, Cheng-Wen
Author_Institution :
SoC Technol. Center, Ind. Technol. Res. Inst., Hsinchu, Taiwan
fYear :
2009
Firstpage :
53
Lastpage :
58
Abstract :
As we adopt more advanced process technologies, the volume production of memory devices, such as DRAM and Flash, becomes more difficult. It seems inevitable that during the ramp-up period, the initial manufacturing yield will be lower, and it takes more time and effort to improve the yield to a reasonable level. Although redundancy can be used to improve the yield eventually, the reserved spares may not be enough at the beginning, so most dies may be irreparable. We propose the usage of three-dimensional (3D) integration to achieve yield enhancement. Through silicon vias (TSVs) patch good memory blocks in a bad die with those in another bad die by bonding them together and enabling the built-in circuit. The die stack has the same functionality, though slightly increases delay and power. Nevertheless, if the production yield takes a long time to achieve, the 3D patched memory is deemed to be a transitional-period product. It does help to shorten time-to-market and make the irreparable memories profitable.
Keywords :
integrated memory circuits; microassembling; semiconductor device manufacture; silicon; 3D patched memory; DRAM; bonding; built-in circuit; die stacking; flash memory; memory devices; memory repair; ramp-up period; three-dimensional integration; through silicon vias; volume production; yield enhancement; Bonding; Circuits; Conferences; Decoding; Manufacturing; Production; Random access memory; Silicon; Stacking; Time to market; 3D memory; die stack; repair scheme; through silicon via; yield enhancement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Memory Technology, Design, and Testing, 2009. MTDT '09. IEEE International Workshop on
Conference_Location :
Hsinchu
Print_ISBN :
978-0-7695-3797-9
Type :
conf
DOI :
10.1109/MTDT.2009.19
Filename :
5279827
Link To Document :
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